Susceptor not only supports Glass but also prevent distortion and maintain flatness by controlling the temperature in LCD or OLED CVD process. PEO surface treatment improve anti-plasma, heat resistance, corrosion resistance so it survives in tough condition such as process gas and high heat. The treatment guarantees high productivity and reliability.
Diffusor is key components of the chamber in CVD process which spread process gas equally on top of Glass. PEO surface treatment is used, in order to resist high heat(350~400℃), endoplasm for process gas.